JPH0645736Y2 - 予備容器を有する処理装置 - Google Patents

予備容器を有する処理装置

Info

Publication number
JPH0645736Y2
JPH0645736Y2 JP11619790U JP11619790U JPH0645736Y2 JP H0645736 Y2 JPH0645736 Y2 JP H0645736Y2 JP 11619790 U JP11619790 U JP 11619790U JP 11619790 U JP11619790 U JP 11619790U JP H0645736 Y2 JPH0645736 Y2 JP H0645736Y2
Authority
JP
Japan
Prior art keywords
container
actuator
processing
spare
seal plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP11619790U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0473657U (en]
Inventor
雅夫 下田
秀信 長野
健二 中原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel Corp filed Critical Nippon Steel Corp
Priority to JP11619790U priority Critical patent/JPH0645736Y2/ja
Publication of JPH0473657U publication Critical patent/JPH0473657U/ja
Application granted granted Critical
Publication of JPH0645736Y2 publication Critical patent/JPH0645736Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Pressure Vessels And Lids Thereof (AREA)
JP11619790U 1990-11-07 1990-11-07 予備容器を有する処理装置 Expired - Fee Related JPH0645736Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11619790U JPH0645736Y2 (ja) 1990-11-07 1990-11-07 予備容器を有する処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11619790U JPH0645736Y2 (ja) 1990-11-07 1990-11-07 予備容器を有する処理装置

Publications (2)

Publication Number Publication Date
JPH0473657U JPH0473657U (en]) 1992-06-29
JPH0645736Y2 true JPH0645736Y2 (ja) 1994-11-24

Family

ID=31864016

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11619790U Expired - Fee Related JPH0645736Y2 (ja) 1990-11-07 1990-11-07 予備容器を有する処理装置

Country Status (1)

Country Link
JP (1) JPH0645736Y2 (en])

Also Published As

Publication number Publication date
JPH0473657U (en]) 1992-06-29

Similar Documents

Publication Publication Date Title
CN110473819B (zh) 一种开门装置、传输腔室和半导体处理设备
TW201619029A (zh) 保持裝置、真空處理裝置
US20120027952A1 (en) Transport device having a deflectable sealing frame
JP4123249B2 (ja) 真空処理装置およびその運転方法
JPH0645736Y2 (ja) 予備容器を有する処理装置
US5571331A (en) Vacuum treatment apparatus
US6076836A (en) Sealing system for a closing flap on a passage orifice
KR19990088444A (ko) 인듐-주석-산화물-성형체의제조방법
JP3184479B2 (ja) 真空クリーンボックス、クリーン搬送方法及び装置
JP2001257255A (ja) クリーンボックス、クリーン搬送方法及び装置
JPH10339377A (ja) ゲートバルブ
CN108456855B (zh) 坩埚、蒸镀准备装置、蒸镀设备及蒸镀方法
JP5309161B2 (ja) プラズマcvd装置
JP3184480B2 (ja) クリーンボックス、クリーン搬送方法及び装置
CN1042518C (zh) 金属制的真空双层容器
JP2893588B2 (ja) 真空炉の蓋の固定方法
US20220275512A1 (en) Apparatus and method for atomic layer deposition (ald)
JPH11241155A (ja) シール部材および真空装置
JPH0426760A (ja) スパッタリング装置
JP3182496B2 (ja) 真空ロード・アンロード方法および真空ゲートバルブならびに真空搬送容器
JPH11185685A (ja) 真空チャンバーのゲートバルブ
JPH04159918A (ja) 真空容器用搬出入方法とその装置
SU1275177A1 (ru) Загрузочное устройство шиберного типа
JP2004273603A (ja) シール部材およびシール構造
SU1134235A1 (ru) Бокс дл обработки предметов

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees